发明名称 |
METHOD FOR FILM FORMATION, APPARATUS FOR FILM FORMATION, AND COMPUTER-READABLE RECORDING MEDIUM |
摘要 |
<p>Disclosed is a method for film formation, characterized by comprising allowing a treatment gas stream containing a metal carbonyl-containing treatment gas and a carbon monoxide-containing carrier gas to flow into a region on the upper outside of the outer periphery of a substrate to be treated in a diameter direction of the substrate while avoiding the surface of the substrate and diffusing the metal carbonyl from the treatment gas stream into the surface of the substrate to form a metal film on the surface of the substrate.</p> |
申请公布号 |
KR101224668(B1) |
申请公布日期 |
2013.01.21 |
申请号 |
KR20107018300 |
申请日期 |
2009.01.23 |
申请人 |
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发明人 |
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分类号 |
C23C16/16;H01L21/205;H01L21/285 |
主分类号 |
C23C16/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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