| 摘要 |
The invention concerns novel silane compounds, which include an adamantyl residue linked to a silicon atom either directly by a carbon-to-silicon bond or, alternatively, via a bridging group, such as an alkylene group. The novel compounds contain at least one hydrolysable group linked to the silicon atom so as to provide for the polymerization of the compounds, e.g. for producing polymers useful as low-k materials. |
