| 摘要 |
PURPOSE: A super high-speed vacuum deposition machine using induction heating is provided to improve the quality of the deposited thin and thick films by depositing the thin and thick films from the metal and oxide sources at super high speeds. CONSTITUTION: A super high-speed vacuum deposition machine using induction heating comprises a vacuum pump, a crucible(110), a crucible heater(120), a multi-layered heat insulating unit(200), an induction heater coil, an induction current shield(500), and a cooling device(400). The vacuum pump creates a high vacuum of 10-6 Torr or lower in a chamber. The crucible, in which the inner diameter of an open-top cylinder gradually increases from the bottom to the top, accommodates a source. The crucible heater encloses the crucible. The insulating unit is located at the outer side of the crucible heater. The induction heater coil is located to surround the outer side of the insulating unit. The induction current shield is located at the outer side of the induction heater coil and blocks the induction current. The cooling device cools the outer side of the induction heater coil.
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