发明名称 Semiconductor Memory And Manufacturing Method Thereof
摘要 <p>A method for manufacturing a semiconductor memory device includes forming a magnetic tunnel junction layer on a lower electrode, forming a spacer having an annular shape on the magnetic tunnel junction layer, forming upper electrodes on both sidewall surfaces of the annular shaped spacer, removing the spacer, and etching the magnetic tunnel junction layer by using the upper electrodes as an etch mask.</p>
申请公布号 KR101215951(B1) 申请公布日期 2013.01.21
申请号 KR20110026277 申请日期 2011.03.24
申请人 发明人
分类号 G11C11/15;H01L21/8247;H01L27/115 主分类号 G11C11/15
代理机构 代理人
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