SUBSTRATE TREATING DEVICE USING PLASMA AND MANUFACTURING METHOD OF ORGANIC LIGHT EMITTING DIODE DISPLAY USING THE SUBSTRATE TREATING DEVICE

摘要

PURPOSE: A substrate processing apparatus using plasma and a method for manufacturing an organic light emitting display device using the same are provided to minimize a power loss due to a rib structure by suppressing the shield of an electromagnetic wave induced from an antenna by narrowing the width of the rib structure. CONSTITUTION: A substrate processing chamber(10) includes a substrate support unit(102) which supports a substrate(50). A rib structure(20) is installed on the upper side of the substrate processing chamber and is formed with a three dimensional structure which is bent in one direction. A dielectric(30) is received in the rib structure. An antenna(40) is connected to a high frequency power source(104) and forms an induced electromagnetic field in the inner space of the dielectric.