SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

摘要

PURPOSE: An apparatus and a method for processing a substrate are provided to precisely control the temperature of a substrate that a stepper requires by detecting the temperature of the substrate heading toward the stepper and detecting the internal temperature of an interface block. CONSTITUTION: A substrate transferring tool transfers temperature-controlled substrates from a temperature controlling plate(53) to a stepper(S4). A first temperature detecting part(70) detects the temperature of a part corresponding to the temperature of the temperature controlling plate. The control part controls a temperature controlling tool based on temperature values detected in the first temperature detecting part and a predetermined temperature set value. A second temperature detecting part(7) detects the temperature of environment to transfer the substrates or the temperature of the transferred substrates. A set value adjusting part adjusts the temperature set value based on temperature values detected in the second temperature detecting part. [Reference numerals] (43) Memory; (44) Program