发明名称 OPTICAL APPARATUS FOR EXPOSURE USING TRAPEZOIDAL TYPE LIGHT CHAMBER
摘要 PURPOSE: An optical device for exposure using light chambers in trapezoidal shape is provided to enhance probability of incidence of direct light, thereby minimizing light loss. CONSTITUTION: An optical device for exposure using light chambers (1) comprises a main body(10), a plurality of light sources(20), a reflective tools(30), and a first optic part(35). The main body comprises a bottom body(12) and a top body(11). The cross section of the top body is in a trapezoidal shape. The bottom body connects the end of the top body. The aperture is formed on one side of the bottom body. The apertures are respectively installed on each side of the plurality of inner surfaces of the top body.
申请公布号 KR20130007330(A) 申请公布日期 2013.01.18
申请号 KR20110065235 申请日期 2011.07.01
申请人 PARK, HEUNG GYUN 发明人 PARK, HEUNG GYUN;JANG, DU CHEON
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
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