发明名称 Metrological characterization of microelectronic circuits
摘要 The method involves analyzing polarization of reflected excitation beam for each measurement of beam at azimuthal angles (phi 1, phi 2) to obtain experimental polarimetric data. Theoretical polarimetric data is calculated for a model object, of a real object, having adjustable parameters. The model object is characterized by iterative comparison of measurements with the theoretical data for different values of the parameters. The parameters of the model object are adjustable using a formalism of the electromagnetism. An independent claim is also included for a device for implementing the flat object measuring method.
申请公布号 KR101221012(B1) 申请公布日期 2013.01.18
申请号 KR20077014486 申请日期 2005.12.22
申请人 发明人
分类号 G01J4/00;H01L21/66 主分类号 G01J4/00
代理机构 代理人
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