INERTIAL SENSOR

摘要

PURPOSE: An inertia sensor is provided to form the thickness of a piezoelectric body of a portion where a sensing electrode is arranged, thereby improving the sensitivity of the inertia sensor. CONSTITUTION: An inertia sensor(100) comprises a plate-shaped membrane(110), a mass body(120), a post(130), a piezoelectric body(140), a sensing electrode(150), and a driving electrode(160). The mass body is arranged in the lower part of a central portion(113) of the membrane. The post is arranged in the lower part of an edge(115) of the membrane, thereby surrounding the mass body. The piezoelectric body is formed in the upper part of the membrane and a cavity(141) is formed in the piezoelectric body in a thickness direction. The sensing electrode is arranged in the inside of the cavity. The driving electrode is arranged in the outside of the cavity.