APPARATUS FOR GROWING SILICON CRYSTAL AND METHOD FOR GROWING SILICON CRYSTAL USING THE SAME

摘要

PURPOSE: An apparatus and method for growing silicon crystal are provided to reduce manufacturing costs by decreasing power consumption for heating a system. CONSTITUTION: A chamber(110) provides a space for growing silicon crystal. A cooling jacket(130) is installed in the chamber and cools silicon ingot(120). A rotation shaft(140) rotates the cooling jacket. A heating unit(150) heats and melts the silicon ingot received in the cooling jacket. A pulling unit moves the heating unit up and down.