| 摘要 |
<p>PURPOSE: A pellicle frame is provided to have small deformation of the pellicle frame under pressure or contraction. CONSTITUTION: A pellicle frame (10) is composed of rectangular shape which includes a pair of long sides(11), and a pair of short sides(12). The jig holes(13) are respectively formed within 15mm from both end parts of the short side. One or more support slots are formed on a short side in the longitudinal direction of the short side. One or more support slots are shallower than the jig hole. The jig hole is formed at the center of the support slot. The cross section of the support slot is hexagon.</p> |
