| 摘要 |
PURPOSE: A method for manufacturing silicone parts, and the silicone parts for an etching device are provided to recycle resources by properly using waste silicone materials. CONSTITUTION: The determined amount of silicone waste materials, silicon raw materials, and impurities are input into a crucible(S120). The materials in the crucible are melted by a carbon heater(S125). The materials in the crucible are cooled(S130). The upper parts of the stiff materials are cut, and poly-crystal silicon is generated(S135). Silicone products are manufactured from the poly-crystal silicon. [Reference numerals] (AA) Start; (BB) End; (S105) Recovering silicone waste materials; (S110) Cleaning the silicone waste materials; (S115) Performing a measuring process; (S120) Putting the determined amount of silicone waste materials, silicone raw materials, and impurities in a crucible; (S125) Melting the materials in the crucible by a carbon heater; (S130) Cooling the materials in the crucible by a cooler; (S135) Ejecting the materials and cutting the surfaces
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