发明名称 SEMICONDUCTOR APPARATUS AND STACKED SEMICONDUCTOR APPARATUS
摘要 PURPOSE: A semiconductor device and a stack semiconductor device are provided to improve productivity by stopping an unnecessary process. CONSTITUTION: A TSV(through silicon via)(301) is electrically connected to a chip. A TSV test unit(302) checks a capacitance element of the TSV and generates an abnormal signal using the checked element. A charging node is electrically connected to the TSV. A charging node supply unit includes the charging node. [Reference numerals] (302,302-1) TSV test unit; (303) Output unit
申请公布号 KR20130007119(A) 申请公布日期 2013.01.18
申请号 KR20110063781 申请日期 2011.06.29
申请人 SK HYNIX INC. 发明人 JEONG, CHUN SEOK;LEE, JAE JIN
分类号 H01L21/66;H01L21/60;H01L23/48 主分类号 H01L21/66
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