发明名称 |
SEMICONDUCTOR APPARATUS AND STACKED SEMICONDUCTOR APPARATUS |
摘要 |
PURPOSE: A semiconductor device and a stack semiconductor device are provided to improve productivity by stopping an unnecessary process. CONSTITUTION: A TSV(through silicon via)(301) is electrically connected to a chip. A TSV test unit(302) checks a capacitance element of the TSV and generates an abnormal signal using the checked element. A charging node is electrically connected to the TSV. A charging node supply unit includes the charging node. [Reference numerals] (302,302-1) TSV test unit; (303) Output unit |
申请公布号 |
KR20130007119(A) |
申请公布日期 |
2013.01.18 |
申请号 |
KR20110063781 |
申请日期 |
2011.06.29 |
申请人 |
SK HYNIX INC. |
发明人 |
JEONG, CHUN SEOK;LEE, JAE JIN |
分类号 |
H01L21/66;H01L21/60;H01L23/48 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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