| 摘要 |
PURPOSE: A probe device is provided to reduce an occupied area by a probe device by overlapping movement areas of both mounters. CONSTITUTION: A substrate transfer unit extracts a substrate from a substrate receiver. The substrate transfer unit mounts the substrate on a mounter of a test part(21A,21B). An upper image capturing unit(5) captures the surface of the substrate. A lower image capturing unit captures a probe of a probe card. A controller calculates a coordinate position where an electrode pad of a chip and the probe of the probe card are contacted and controls the mounter and the image capturing unit. |
