| 摘要 |
PURPOSE: A substrate inspecting device and an OLED manufacturing apparatus including the same are provided to improve the yield of a panel process by simply repairing defects through a repair chamber. CONSTITUTION: A vacuum chamber(513) vacuumizes an inspection chamber(504) by exhausting the inspection chamber of air. An inspection unit inspects a substrate inputted to the vacuum chamber and includes a first inspection unit(509), a second inspection unit(510), and a control unit. The first inspection unit firstly inspects the surface of the substrate. The second inspection unit precisely inspects the defective part determined by the first inspection unit. An air conditioning unit(514) raises or lowers the temperature of the inspection chamber.
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