NITRIDE FLOATING CAPACITOR MASK

摘要

PURPOSE: An NFC(Nitride Floating Capacitor) mask is provided to prevent a storage electrode from being bent by partially connecting a mat division line not to be long extended. CONSTITUTION: A first mat division line(110a) is divided at 45 degrees based on a wafer flat zone. A second mat division line(110b) is extended to be longer than the first mat division line. An NFC mask pattern(100) is separated by the first mat division line and the second mat division line. A joint connects the second mat division line to the NFC mask pattern.