发明名称 HEAT PLATE FOR LAMINATING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a heat plate capable of keeping a temperature in a surface of a heat plate uniform in a laminating machining process, and to provide a laminating device using the heat plate. <P>SOLUTION: The heat plate for a laminating device is the heat plate for the laminating device which is provided with an upper chamber and a lower chamber which are separated through a pressing member, wherein a workpiece 10 is loaded on the heat plate 20 arranged in the lower chamber; the workpiece 10 is heated through the heat plate 20 so as to vacuumize the lower chamber, and the air is introduced into the upper chamber, the workpiece is clamped and laminated by the heat plate 20 and the pressing member; the heat plate 20 is internally provided with a plurality of heaters 203 or a plurality of groups of paired heaters 203 and heating pipes 204; and furthermore, temperature sensors 207 are further arranged on at least three positions along the direction of conveying the workpiece loaded on the heat plate 20. The temperature in the surface of the heat plate is controlled to be uniformly distributed. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013010330(A) 申请公布日期 2013.01.17
申请号 JP20110145989 申请日期 2011.06.30
申请人 NISSHINBO MECHATRONICS INC 发明人 SHINODA TAKASHI;NAKAMURA MASANORI
分类号 B29C63/16;H01L31/042 主分类号 B29C63/16
代理机构 代理人
主权项
地址