发明名称 |
Container Having Multiple Compartments Containing Liquid Material for Multiple Wafer-Processing Chambers |
摘要 |
A container for containing a liquid material for processing a wafer includes: a container body; a divider dividing the interior of the container body and defining compartments fluid-tightly sealed off from each other except for bottom portions of the compartments; gas inlet ports for introducing gas to the respective compartments and gas outlet ports for discharging gas from the respective compartments; and a liquid level sensor provided in one of the compartments for keeping a liquid surface of a liquid material above the bottom portions when the container is in use conditions.
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申请公布号 |
US2013014697(A1) |
申请公布日期 |
2013.01.17 |
申请号 |
US201113181407 |
申请日期 |
2011.07.12 |
申请人 |
ASM JAPAN K.K.;KANAYAMA HIROKI |
发明人 |
KANAYAMA HIROKI |
分类号 |
C23C16/455;C23C16/50;C23C16/52 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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