| 摘要 |
PURPOSE: A large-displacement precise rotary motion device and a control method thereof are provided to prevent rubbing and scratches by performing a walking motion instead of stick-slip. CONSTITUTION: A large-displacement precise rotary motion device comprises a positioning part(100), a pair of first and second driving parts(200,200'), a base(300), and a controller. The positioning part is arranged on the top of the device and performs a location deciding function. A pair of first and second driving parts comprises upper moving parts, a lower moving parts, and springs. The upper moving parts are integrated with the positioning part. A plurality of permanent magnets is attached to the lower part of the upper moving part. The lower moving part is arranged on the lower part of the upper moving part. A plurality of coils, corresponding to a permanent magnet, is attached to the lower moving part. The controller controls motions of X-axis, Y-axis, roll, pitch, and yaw directions using power amplifiers, open-loop or closed-loop control algorism and a computer. |
