| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently remove aluminum chloride without causing clogging of pipes and the like. <P>SOLUTION: This method for producing trichlorosilane includes: reacting metallic silicon with tetrachlorosilane and hydrogen; condensing the resulting reaction gas; and distilling the resulting condensate using a distillation system 7 including a crude distillation column 13 and a secondary distillation column 15 so as to refine trichlorosilane. The condensate is maintained in a high temperature state so that the concentration of aluminum chloride in the condensate becomes in a range of saturation solubility or lower, and while maintaining the high temperature state, the condensate is made to flow to the crude distillation column 13. A liquid distilled in the crude distillation column 13 is distilled by the secondary distillation column 15 so as to refine trichlorosilane. A liquid in which the aluminum chloride is concentrated is extracted from the bottom portion of the crude distillation column 13. The extracted liquid is concentrated and dried, and then a solid material containing the aluminum chloride is discharged. <P>COPYRIGHT: (C)2013,JPO&INPIT |
