发明名称 |
RESONATOR DEVICE INCLUDING ELECTRODE WITH BURIED TEMPERATURE COMPENSATING LAYER |
摘要 |
An acoustic resonator device includes a composite first electrode on a substrate, a piezoelectric layer on the composite electrode, and a second electrode on the piezoelectric layer. The first electrode includes a buried temperature compensating layer having a positive temperature coefficient. The piezoelectric layer has a negative temperature coefficient, and thus the positive temperature coefficient of the temperature compensating layer offsets at least a portion of the negative temperature coefficient of the piezoelectric layer.
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申请公布号 |
US2013015747(A1) |
申请公布日期 |
2013.01.17 |
申请号 |
US201213624046 |
申请日期 |
2012.09.21 |
申请人 |
AVAGO TECHNOLOGIES WIRELESS IP (SINGAPORE) PTE. LTD.;TECHNOLOGIES WIRELESS IP (SINGAPORE) PTE. LTD. AVARO |
发明人 |
RUBY RICHARD C.;PANG WEI;ZOU QIANG;LEE DONALD |
分类号 |
H01L41/04 |
主分类号 |
H01L41/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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