| 摘要 |
This inertial drive actuator is characterized by comprising: a displacement means that generates minute displacements in a first direction, and a second direction which is opposite to the first direction; a vibrating substrate that moves in a reciprocating motion due to the minute displacements of the displacement means; and a moving element that is positioned on a level surface of the vibrating substrate, and has a first magnetic field generating means. The inertial drive actuator is further characterized in that the moving element has a first yoke that induces a magnetic flux generated by the first magnetic field generating means of the moving element, and has a second yoke on the opposite side in the direction facing the moving element of the vibration substrate, such that the magnetic flux generated by the first magnetic field generating means concentrates in the north pole and south pole on a surface on the moving element side facing the vibration substrate; and is further characterized in that a frictional force acting between the moving element and the vibrating substrate is controlled, and the moving element is driven by controlling the magnetic field generated by the first magnetic field generating means. |
