发明名称 |
METHODS AND APPARATUS FOR PROCESSING SUBSTRATES USING MODEL-BASED CONTROL |
摘要 |
Methods and apparatus are disclosed herein. In some embodiments, methods of controlling process chambers may include predetermining a relationship between pressure in a processing volume and a position of an exhaust valve as a function of a process parameter; setting the process chamber to a first state having a first pressure in the processing volume and a first value of the process parameter, wherein the exhaust valve is set to a first position based on the predetermined relationship to produce the first pressure at the first value; determining a pressure control profile to control the pressure as the process chamber is changed to a second state having a second pressure and a second process parameter value from the first state; and applying the pressure control profile to control the pressure by varying the position of the exhaust valve while changing the process chamber to the second state. |
申请公布号 |
US2013018500(A1) |
申请公布日期 |
2013.01.17 |
申请号 |
US201113183520 |
申请日期 |
2011.07.15 |
申请人 |
APPLIED MATERIALS, INC.;PORTHOUSE KEITH BRIAN;LANE JOHN W.;GREGOR MARIUSCH;MERRY NIR;RICE MICHAEL R.;MINKOVICH ALEX;LI HONGBIN;DZILNO DMITRY A. |
发明人 |
PORTHOUSE KEITH BRIAN;LANE JOHN W.;GREGOR MARIUSCH;MERRY NIR;RICE MICHAEL R.;MINKOVICH ALEX;LI HONGBIN;DZILNO DMITRY A. |
分类号 |
G05D16/20;G05B13/04;G06F17/11 |
主分类号 |
G05D16/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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