| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer storage container with a cushion sheet that prevents semiconductor wafers from being broken during transportation or the like, and allows to simply attach/detach the cushion sheet to/from a tray if required so as to easily wash or replace the cushion sheet. SOLUTION: An elastic wafer-placing cushion sheet 5 is arranged at a semiconductor wafer W placing position on the upper face of a wafer placing tray 1. A freely attachable/detachable suction face (5B) is freely attachably/detachably sucked to the wafer placing tray 1, and is formed on the wafer-placing cushion sheet 5. COPYRIGHT: (C)2008,JPO&INPIT |
