METHOD FOR MANUFACTURING LAYERED-FILM-BEARING GLASS SUBSTRATE

摘要

A method for manufacturing a layered-film-bearing glass substrate. In said method, a plurality of injectors provided in an annealing lehr are used to form a layered film on a glass ribbon via CVD and said glass ribbon is then cut. Said layered film is formed at Tg+50°C or less, and at least two of the layers constituting said layered film are formed at temperatures from Tg to Tg+50°C. Also, within the temperature range within which all of the layers constituting the layered film are formed, the temperature decrease (K1) per unit length of the glass ribbon satisfies the relation 0°C/m < K1 < 10°C/m.