NANOSTRUCTURED SENSING DEVICE AND METHOD OF FABRICATING SAME

摘要

The present invention relates generally to a nanostructured sensing device comprises of a support structure, at least one suspended resistor structure which is formed perpendicular to said support structure and a plurality of sensing elements being assembled onto said resistor structure, wherein said resistor structure is anchored to said support structure via at least one hinge pad. Said sensing device of the present invention can be fabricated by two different approaches, either said hinge pad is being deposited first and followed by the grow of said plurality of sensing elements on both top and bottom of said resistor structure or said plurality of sensing elements is grown before said hinge pad is deposited.