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发明名称
气体供应装置
摘要
本发明描述用于供应及量测至一抽汲配置之一冲洗气体流量之装置,该装置包括:一歧管,其具有一气体入口及各用于供应气体至该抽汲配置之一相应口的复数个气体出口;及一流量选择器,其在该入口与该等出口之间,该流量选择器具有各种大小之复数个间隔开的孔,且该流量选择器相对于该歧管自该等孔之一第一组与该入口及该等出口对准之一位置可移动至该等孔之一第二组与该入口及该等出口对准之另一位置,以变化气体流入该流量选择器中及流出该流量选择器之流动速率,且使该气体流动速率能够跨越与该入口对准之孔而量测。
申请公布号
TW200813251
申请公布日期
2008.03.16
申请号
TW096109537
申请日期
2007.03.20
申请人
BOC集团公司
发明人
菲利普 诺斯;大卫 保罗 曼森
分类号
C23C16/455(2006.01);H01L21/205(2006.01);C23C16/54(2006.01)
主分类号
C23C16/455(2006.01)
代理机构
代理人
陈长文
主权项
地址
英国
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