CHUCKING MEMBER AND SPIN HEAD, METHOD FOR CHUCKING A SUBSTRATE USING THE CHUCKING MEMBER

摘要

A chucking member, a spin head, and a chucking method using the chucking member are provided to smoothly discharge an air stream along the outer circumferences of a chucking pin and to prevent the re-inflow of a treatment liquid being discharged toward the external into a rear of a substrate by using the chucking member. A chucking member(100) includes a chucking pin(120), a body(140) and a rotational shaft(160). The chucking pin includes a first front end and a first rear end. The body supports the chucking pin and is rotated together with the chucking pin by the revolution of the rotational shaft. The body includes a second front end and a second rear front end. When the chucking member is rotated, the first front end is contacted to a lateral section of a wafer and the wafer is supported by the first front end. An air stream formed around the substrate is discharged to the external along the outer circumference of the body of the chucking member.