| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve plating quality and to prevent dropout and damage of substrates in carrying them, by preventing swinging of a plate-like work in a plating tank. <P>SOLUTION: The plating tank 2a includes: an upper part guide rail 11 which is disposed above the tank and carries a carrying hanger 15a in a moving direction; and a lower part guide rail 14 which is provided in a plating tank 2a and generates attracting force against a lower clamp 49 of the carrying hanger 15a. By generating the attracting force when performing a plating treatment, and pulling the lower clamp 49 of the carrying hanger 15a downward, tension is given to the plate-like work W. <P>COPYRIGHT: (C)2013,JPO&INPIT |
