| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a high channel mobility by bringing the side surface of a trench, in which a channel is formed, close to the (11-20) plane or the (1-100) plane capable of increasing the channel mobility. <P>SOLUTION: An n<SP POS="POST">+</SP>source region 5 is formed so as to come into contact with one side surface out of both side surfaces of a trench 7, i.e. the side surface which forms an angle of 90° or an angle close to it with respect to the (0001) plane, so that a channel is formed in only one of both side surfaces of the trench 7. Since the channel can be formed only in the side surface where a high channel mobility is formed out of both side surfaces of the trench 7, a high channel mobility can be obtained. <P>COPYRIGHT: (C)2013,JPO&INPIT |
