| 摘要 |
A plasma processing system with a multi-grid arrangement is provided. The system includes a plurality of grids, which includes at least a beam grid, a ground grid and a suppressor grid. The beam grid is positioned facing a plasma producing area, wherein the beam grid having similar electrical potential as a plasma. The ground grid is positioned to face a substrate during substrate processing and is configured to be electrically grounded. The suppressor grid is positioned between the beam grid and the ground grid and is configured to be negatively charged. The plurality of grids further includes a set of grid mounting posts configured for at least one of stabilizing said multi-grid arrangement, spatially separating adjacent grids, and fastening the plurality of grids into the multi-grid arrangement.
|
