Pyrometer arrangement for use in vacuum treatment plant, has slide valve arranged in tube outer side of vacuum chamber between chamber wall and pyrometer and vacuum-tightly locking vacuum chamber before pyrometer

摘要

The arrangement has a vacuum chamber disconnected from an atmosphere by a chamber wall. The vacuum chamber is connected with the chamber wall by a tube (10) in such a manner that a measuring axis is directed at a measuring point in the vacuum chamber by pipe interior. The tube vacuum-tightly penetrates the chamber wall by a wall opening and opens with a tube aperture in the vacuum chamber. A slide valve (9) is arranged in tube outer side of the vacuum chamber between the chamber wall and a pyrometer (8), and vacuum-tightly locks the vacuum chamber before the pyrometer.