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经营范围
发明名称
成膜装置、成膜系统、以及成膜方法
摘要
申请公布号
TW200818267
申请公布日期
2008.04.16
申请号
TW096129434
申请日期
2007.08.09
申请人
东京威力科创股份有限公司
发明人
茂山和基;野泽俊久
分类号
H01L21/20(2006.01)
主分类号
H01L21/20(2006.01)
代理机构
代理人
林志刚
主权项
地址
日本
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