发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device and a manufacturing method of the same, which can appropriately protect a GaN-based transistor with a simple structure. <P>SOLUTION: A gate electrode 110g and a protective diode electrode 115p are connected with each other. An insulation film 113 flows, when a voltage at a predetermined value and over is applied to the gate electrode 110g, a leakage current between the protective diode electrode 115p, and an electron transit layer 104 and an electron supply layer 103. The predetermined value is higher than a voltage at which a HEMT performs an ON operation and lower than a breakdown voltage of a gate insulation film 109g. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013012692(A) 申请公布日期 2013.01.17
申请号 JP20110146081 申请日期 2011.06.30
申请人 FUJITSU SEMICONDUCTOR LTD 发明人 AKIYAMA SHINICHI;KOTANI YOSHIYUKI;WAKABAYASHI TOSHIHIRO;MIYAMOTO MASATO
分类号 H01L21/337;H01L21/338;H01L21/822;H01L21/8232;H01L27/04;H01L27/06;H01L27/095;H01L29/778;H01L29/808;H01L29/812;H01L29/861;H01L29/868 主分类号 H01L21/337
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