| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low-cost dynamic quantity sensor device and a method for manufacturing the same in which a pressure sensor and a high accuracy dynamic quantity sensor are optimally modularized in such a manner that the modularization does not decrease the performance of each dynamic quantity sensor. <P>SOLUTION: In a dynamic quantity sensor device 100, a first dynamic quantity detection part M1 of a first dynamic quantity sensor R1 for detecting a pressure and a second dynamic quantity detection part M2 of a second dynamic quantity sensor R2 are displaceably formed on a first base 10, on which a second base plate 20 is stuck to form a first space K1 and a second space K2 that are not in communication with each other. The first substrate 10 consists of an SOI substrate. The first dynamic quantity detection part M1 and the second dynamic quantity detection part M2 are each arranged on part of a semiconductor region S consisting of an SOI layer 3. The second dynamic quantity detection part M2 measures a change in capacitance of two opposing surfaces in a second movable semiconductor region S2a and a second fixed semiconductor region S2b to detect a second dynamic quantity. <P>COPYRIGHT: (C)2013,JPO&INPIT |
