发明名称 MEMS WITH SINGLE USE VALVE AND METHOD OF OPERATION
摘要 In one embodiment, a method of opening a passageway to a cavity includes providing a donor portion, forming a heating element adjacent to the donor portion, forming a first sacrificial slab abutting the donor portion, wherein the donor portion and the sacrificial slab are a shrinkable pair, forming a first cavity, a portion of the first cavity bounded by the first sacrificial slab, generating heat with the heating element, forming a first reduced volume slab from the first sacrificial slab using the generated heat and the donor portion, and forming a passageway to the first cavity by forming the first reduced volume slab.
申请公布号 US2013015536(A1) 申请公布日期 2013.01.17
申请号 US201113180954 申请日期 2011.07.12
申请人 ROBERT BOSCH GMBH;FEYH ANDO;CHEN PO-JUI 发明人 FEYH ANDO;CHEN PO-JUI
分类号 H01L29/84;H01L21/283 主分类号 H01L29/84
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