发明名称 APPARATUS AND A METHOD AND A SYSTEM FOR TREATING A SURFACE WITH AT LEAST ONE GLIDING ARC SOURCE
摘要 The invention relates to an apparatus for treating a surface with a at least one gliding arc source comprising at least one gas flow controlling unit (104); and a set of electrodes (102); wherein the at least one gas flow controlling unit (104) and the set of electrodes (102) are controlled to provide a plasma comprising a gas temperature at the set of electrodes (102) above approximately 2000 K. In this way, an optimal or substantially optimal plasma for treating surfaces of samples is achieved.
申请公布号 US2013015159(A1) 申请公布日期 2013.01.17
申请号 US201013516156 申请日期 2010.12.14
申请人 DANMARKS TEKNISKE UNIVERSITET;KUSANO YUKIHIRO 发明人 KUSANO YUKIHIRO
分类号 H05H1/24;B44C1/22 主分类号 H05H1/24
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