SCANNING THERMAL MICROSCOPE AND METHOD FOR TEMPERATURE PROFILING USING SAME

摘要

The present invention relates to a scanning thermal microscope for profiling quantitative temperatures and thermal characteristics of a sample by scanning the sample, and to a method for temperature profiling using same. In particular, the scanning thermal microscope of the present invention comprises: a probe having a pointed end for scanning a sample; a driving-power supply unit for heating the pointed end of the probe in order to drive the pointed end of the probe into an active mode; a driving mechanism for controlling the height position of the pointed end of the probe in order to drive the pointed end of the probe into a contact mode, in which the pointed end of the probe contacts the sample, and into a non-contact mode, in which the pointed end of the probe is spaced apart from the sample; a control unit for controlling the driving-power supply unit and the driving mechanism in order to scan the sample in each of the contact mode and the non-contact mode by driving the pointed end of the probe into the active mode or a passive mode; and a sample-temperature measuring unit for measuring the temperature of the sample using a thermoelectric voltage generated at the pointed end of the probe due to the scanning of the sample.