发明名称 OPTICAL ELEMENT AND MANUFACTURING METHOD THEREFOR
摘要 <P>PROBLEM TO BE SOLVED: To provide an optical element capable of improving condensation to an optical area, such as a light receiving unit, with a reduced size. <P>SOLUTION: The optical element includes a semiconductor substrate 101 having an optical area (light receiving unit 102, which is a photodiode) and a transparent insulator film 111 disposed on the semiconductor substrate 101. The transparent insulator film 111 includes a first area (area sandwiched by light shielding films 110) right on the optical area, and a second area on the first area. The transparent insulator film 111 is disposed at an identical height to the second area and includes a third area (area on the light shielding films 110) positioned outside the second area in a plan view. The hole diameter of a hole 115 included in the first area is smaller than the hole diameter of a hole 115 included in the third area. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013012653(A) 申请公布日期 2013.01.17
申请号 JP20110145498 申请日期 2011.06.30
申请人 PANASONIC CORP 发明人 SEO TOSHINORI
分类号 H01L27/14;H01L21/312;H01L21/316;H01L27/148;H01L31/10 主分类号 H01L27/14
代理机构 代理人
主权项
地址