| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a target material which can be efficiently used during magnetron sputtering in a soft magnetic alloy for a perpendicular magnetic recording medium excellent in saturation magnetic flux density, amorphousness, and weatherability. <P>SOLUTION: The alloy target material for a soft magnetic film layer in a perpendicular magnetic recording medium includes two or more of Zr, Hf, Nb, Ta and B, with the balance comprising Co and Fe and inevitable impurities, satisfies formulas 1 and 2 below, and has relative density of 99% or more, formula (1): 0.60≤ Fe/(Fe+Co) ≤0.65 (at.% ratio), and formula (2): 5 at% ≤ (Zr+Hf+Nb+Ta)+B/2 ≤10 at%, provided that B is 7% or less. <P>COPYRIGHT: (C)2013,JPO&INPIT |
