发明名称 METHOD AND DEVICE FOR PRODUCING A THIN-FILM SOLAR CELL
摘要 The invention relates to a method for producing a thin-film solar cell having a multilayered construction comprising a substrate (1), a seed layer (2) and an absorber layer (3), comprising the following steps: producing the seed layer (2) by applying an amorphous first layer of a first semiconductor material (2.1) on the substrate (1) and applying a first laser beam (4.1) to the first layer in order to crystallize said layer, producing the absorber layer (3) on the seed layer (2) by applying a second layer of a second semiconductor material (3.1) ply by ply and applying a pulsed, second laser beam 4.2 to the second layer ply by ply, wherein ply-by-ply epitaxial growth of the second layer is effected, characterized in that the ply-by-ply application is effected with a maximum of two plies and the second laser beam (4.2) has a wavelength in a range of 500 to 1100 nm and a pulse duration in the range of 300 to 1200 ns. The invention furthermore relates to a device for carrying out the method according to the invention.
申请公布号 WO2012041314(A3) 申请公布日期 2013.01.17
申请号 WO2011DE75207 申请日期 2011.08.31
申请人 JENOPTIK AUTOMATISIERUNGSTECHNIK GMBH;ANDRAE, GUDRUN;FALK, FRITZ;BERGMANN, JOACHIM;ZUEHLKE, HANS-ULRICH;EBERHARDT, GABRIELE;BURGHARDT, BERTHOLD 发明人 ANDRAE, GUDRUN;FALK, FRITZ;BERGMANN, JOACHIM;ZUEHLKE, HANS-ULRICH;EBERHARDT, GABRIELE;BURGHARDT, BERTHOLD
分类号 H01L31/18;B23K26/00;H01L31/036;H01L31/0392 主分类号 H01L31/18
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