| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser processing device wherein an objective lens of a condenser is not polluted even if smoke occurs by irradiation of a laser beam. <P>SOLUTION: This laser processing device includes: a chuck table holding an object to be processed; a laser beam irradiation means irradiating the laser beam of a wavelength having transmissivity to the object to be processed held by the chuck table; and a processing-feeding means performing relative processing-feeding of the chuck table and the laser beam irradiation means. The laser beam irradiation means includes: a laser oscillator; and the condenser condensing the laser beam oscillated by the laser oscillator, positioning a condensing point inside the object to be processed, and forming a reformed layer inside the object to be processed. The laser processing device includes a gas jet means disposed adjacently to the condenser, and having a nozzle jetting gas toward a region of the object to be processed, irradiated by the laser beam. <P>COPYRIGHT: (C)2013,JPO&INPIT |
