发明名称 |
PLOTTING DATA CREATING PROGRAM, PLOTTING DATA CREATING DEVICE AND PLOTTING DATA CREATING METHOD |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plotting data creating program, a plotting data creating device and a plotting data creating method capable of sizing pre-processing plotting data disposed so that shot diagrams each associated with dosage amount are overlapped with each other. <P>SOLUTION: A post-processing plotting data creation program 41 is a program for creating a piece of post-processing plotting data 2f for plotting a plotting shape on a mask on the basis of a piece of pre-processing plotting data 2 including plural pre-processing shot diagrams 3 (3-1 to 3-12) in which neighboring pre-processing shot diagrams 3 are overlapped with each other. A sizing device 30 functions as a storage 40 that stores the pre-processing plotting data 2, and a sizing control section 51 that creates post-processing shot diagrams 3e (3e-1 to 3e-12) in which the pre-processing plotting data 2 in the storage 40 is corrected for each of pre-processing shot diagrams 3 and creates the post-processing plotting data 2f by re-disposing the post-processing shot diagrams 3e. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2013012578(A) |
申请公布日期 |
2013.01.17 |
申请号 |
JP20110144156 |
申请日期 |
2011.06.29 |
申请人 |
DAINIPPON PRINTING CO LTD |
发明人 |
NARUKAWA TERUSATO;OSAWA ISAKU |
分类号 |
H01L21/027;G03F7/20 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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