| 摘要 |
An electrostatic force measuring apparatus is provided to measure electrostatic force by calculating the force applied to a substrate when the substrate is separated from an electrostatic chuck by a lift part. A power supply part(500) applies a voltage to an electrostatic chuck. A lift part(200) separates the substrate from the electrostatic chuck. A driving part(300) drives the lift part to separate the substrate from the electrostatic chuck. A control part(400) measures the weight of a weight control part when the lift part comes in contact with the substrate, measures the weight of the weight control part when the substrate is separated from the electrostatic chuck, and compares the measured weight values to calculate electrostatic force by a difference value. A detection part can detect whether the substrate is separated from the electrostatic chuck.
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