发明名称 |
Self-Imageable Layer Forming Polymer and Compositions Thereof |
摘要 |
Copolymers and compositions thereof useful for forming self-imageable films encompassing such copolymers are disclosed. Such copolymers encompass norbornene-type repeating units and maleic anhydride-type repeating units where at least some of such and maleic anhydride-type repeating units have been ring-opened. The films formed from such copolymer compositions provide self imageable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices. |
申请公布号 |
US2013017488(A1) |
申请公布日期 |
2013.01.17 |
申请号 |
US201213550586 |
申请日期 |
2012.07.16 |
申请人 |
PROMERUS LLC;SUMITOMO BAKELITE CO., LTD.;ONISHI OSAMU;IKEDA HARUO;TAGASHIRA NOBUO;RHODES LARRY;KANDANARACHCHI PRAMOD |
发明人 |
ONISHI OSAMU;IKEDA HARUO;TAGASHIRA NOBUO;RHODES LARRY;KANDANARACHCHI PRAMOD |
分类号 |
G03F7/027;G03F7/004 |
主分类号 |
G03F7/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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