发明名称 Self-Imageable Layer Forming Polymer and Compositions Thereof
摘要 Copolymers and compositions thereof useful for forming self-imageable films encompassing such copolymers are disclosed. Such copolymers encompass norbornene-type repeating units and maleic anhydride-type repeating units where at least some of such and maleic anhydride-type repeating units have been ring-opened. The films formed from such copolymer compositions provide self imageable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices.
申请公布号 US2013017488(A1) 申请公布日期 2013.01.17
申请号 US201213550586 申请日期 2012.07.16
申请人 PROMERUS LLC;SUMITOMO BAKELITE CO., LTD.;ONISHI OSAMU;IKEDA HARUO;TAGASHIRA NOBUO;RHODES LARRY;KANDANARACHCHI PRAMOD 发明人 ONISHI OSAMU;IKEDA HARUO;TAGASHIRA NOBUO;RHODES LARRY;KANDANARACHCHI PRAMOD
分类号 G03F7/027;G03F7/004 主分类号 G03F7/027
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