| 摘要 |
<p>The present invention relates to an hot wire flux sensor and a flow meter using same, and more specifically, to a flux sensor and a flow meter using same in which the hot wire flux sensor is manufactured using micro-electro mechanical systems (MEMS) technology, the flux sensor enabling the temperatures of the fluid flowing through a conduit pipe to be measured at the entrance side and at the exit side, and, simultaneously, facilitating the position of the sensor or a heater to be varied on the basis of the volume or the type of the fluid. The flow meter comprises: a rectangular panel; at least three heating patterns, each of which is formed on the end part at one side of the panel in the lengthwise direction, and which are arranged side-by-side along the widthwise direction of the panel; electric line patterns, which extend from both ends of each of the heating patterns to the end part at the other side of the panel; and electrode pads, which are formed on a substrate and which are connected to respective end parts of the electronic line pattern not connected to a heating pattern. The flow meter is characterized in that the heating patterns disposed in the outermost position on both sides are RTD sensors, and the heating patterns to the inside of the RTD sensor are heaters. The hot wire flux sensor and the flow meter using same according to the present invention have the significant benefit in enabling a flexible response in accordance with the volume, speed and type of the fluid by variably controlling an RTD sensing part and temperature sensing part.</p> |
