| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a calibration method for a shape measuring probe that enables high-accuracy calibration of a probe for measuring a shape of a measured object even if a center of the probe does not reach a center position of a rotary table for placing the measured object. <P>SOLUTION: A calibration method for a shape measuring probe 22, for measuring a shape of work-piece on a rotary table 11, includes the steps of: providing a reference cylinder 30 for calibration around a table rotation axis C located at a wheel base L in a rotatable manner; setting theoretical center locations O<SB POS="POST">L</SB>and O<SB POS="POST">R</SB>of the probe 22 on the basis of a radius r of the probe 22, and a radius R of and an angle of traverse α<SB POS="POST">t</SB>of the reference cylinder 30; obtaining theoretical contact locations, where the probe 22 positioned at the theoretical center locations O<SB POS="POST">L</SB>and O<SB POS="POST">R</SB>contacts the reference cylinder 30 rotated by the angle of traverse α<SB POS="POST">t</SB>, and a real contact location; and calibrating the probe 22 in accordance with a location error obtained on the basis of an error in the angle of traverse between the locations, the wheel base L, the radius r of the probe 22 and the radius R of the reference cylinder 30. <P>COPYRIGHT: (C)2013,JPO&INPIT |
