发明名称 PROCESS AND APPARATUS FOR COATING
摘要 The present invention relates to an aerosol-assisted process for providing a coating (2) on a substrate (1) in which process precursors react on a surface (34) of the substrate (1) for providing the coating (2). The process comprises providing a first precursor flow and a second precursor flow separate from the first precursor flow. The process further comprises providing a water flow, the water flow being separate from the first precursor flow and the second precursor flow and supplying the water flow into the reaction space (5) for accelerating the surface reactions providing the coating (2).
申请公布号 WO2012146828(A3) 申请公布日期 2013.01.17
申请号 WO2012FI50412 申请日期 2012.04.26
申请人 BENEQ OY;ILMARINEN, JOONAS 发明人 ILMARINEN, JOONAS
分类号 C23C16/448;B05D1/00;C03C17/00;C23C16/455;C23C18/12 主分类号 C23C16/448
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