发明名称 |
PROCESS AND APPARATUS FOR COATING |
摘要 |
The present invention relates to an aerosol-assisted process for providing a coating (2) on a substrate (1) in which process precursors react on a surface (34) of the substrate (1) for providing the coating (2). The process comprises providing a first precursor flow and a second precursor flow separate from the first precursor flow. The process further comprises providing a water flow, the water flow being separate from the first precursor flow and the second precursor flow and supplying the water flow into the reaction space (5) for accelerating the surface reactions providing the coating (2). |
申请公布号 |
WO2012146828(A3) |
申请公布日期 |
2013.01.17 |
申请号 |
WO2012FI50412 |
申请日期 |
2012.04.26 |
申请人 |
BENEQ OY;ILMARINEN, JOONAS |
发明人 |
ILMARINEN, JOONAS |
分类号 |
C23C16/448;B05D1/00;C03C17/00;C23C16/455;C23C18/12 |
主分类号 |
C23C16/448 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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