| 摘要 |
In order to test a substrate, a measurement area is set on the substrate first and reference data on the measurement area are obtained. Then, measurement data on the measurement area are obtained for each color, and a lighting condition is set by using the reference data and measurement data for each color obtained with respect to the measurement area. Then, a feature object is set for the measurement area, and the reference data corresponding to the feature object are compared with the measurement data corresponding to the feature object according to the set lighting condition, in order to obtain a distortion amount between the reference data and the measurement data. Next, a test area is set in the measurement area by correcting the distortion amount. Accordingly, an accurate test area having corrected distortion may be set. |
