| 摘要 |
The present invention relates to a device for preparing a metal or a metallic compound nano particle attached to a support, the device comprising: a vacuum evaporation vessel; an agitating vessel provided in the vacuum evaporation vessel; a screw provided inside the agitating vessel, for agitating the support; and an evaporation source provided on the upper portion of the agitating vessel inside the vacuum evaporation vessel, for evaporating the metal or the metallic compound, wherein the upper end of the side surface of the agitating vessel is bent at 1-90 degrees towards the center with the perpendicular plane as the basis, and the screw is provided in a horizontal or a vertical direction, so as to agitate 1/5-3/4 of the entire depth of the support charged in the agitating vessel. |
